Thermal management for semiconductor metrology equipment

Today, automated metrology systems are implemented throughout the thin film semiconductor manufacturing process. Since many of the properties of a thin film are also temperature dependent, temperature stability is key and thermal management is critical. In addition temperature control of the stages and other critical components is required for accurate and repeatable measurements over lengthy periods of time.

In this white paper we will review two major thermal management systems that are in use and the emerging trends for metrology systems and the implications for their associated thermal management systems.

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